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patent

Vertical cavity surface emitting laser

Kapon, Elyahou  
•
Iakovlev, Vladimir  
•
Sirbu, Alexei  
Show more
2002

An electrically pumped VCSEL (10) and a method of its fabrication are presented. The VCSEL (10) comprises an active cavity material (14) sandwiched between top and bottom DBR stacks (12a, 12b), the top DBR (12b) having at least one n-semiconductor layer. The device defines an aperture region (25) between the structured surface (14b) of the active cavity material (14) and the n-semiconductor layer of the top DBR stack (12b). The structured surface (14b) is formed by a top surface of a mesa (22) that includes at least the upper n<++> layer of a p<++>/n<++> tunnel junction and the surface of a p-type layer outside the mesa (22). The structured surface (14b) is fused to the surface of the n-semiconductor layer of the DBR stack (12b) due to the deformation of these surfaces, thereby creating an air gap (24) in the vicinity of the mesa (22) between the fused surfaces. The active region is defined by the current aperture (25) which includes the mesa (22) surrounded by the air gap (24), thereby allowing for restricting an electrical current flow to the active region, while the air gap (24) provides for the lateral variation of the index of refraction in the VCSEL (10).

  • Details
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Type
patent
EPO Family ID

25200856

Author(s)
Kapon, Elyahou  
Iakovlev, Vladimir  
Sirbu, Alexei  
Rudra, Alok  
Note

Alternative title(s) : (de) Mikroelektromechanisch abstimmbare photonische vorrichtung mit vertikalem resonator und verfahren zu ihrer herstellung (fr) Dispositif photonique a cavité verticale, pouvant etre accordé de manière micro-électromécanique et son procédé de fabrication (en) A micro-electromechanically tunable vertical cavity photonic device and a method of fabrication thereof

TTO classification

TTO:6.0251

EPFL units
LPN  
AVP-R-TTO  
DOICountry codeKind codeDate issued

JP4174322

JP

B2

2008-10-29

KR100622852

KR

B1

2006-09-18

KR100623406

KR

B1

2006-09-18

CN1263209

CN

C

2006-07-05

DE60204007

DE

T2

2006-03-16

ES2241988

ES

T3

2005-11-01

DE60204007

DE

D1

2005-06-09

AT295011

AT

T

2005-05-15

US6890778

US

B2

2005-05-10

HK1069020

HK

A1

2005-05-06

EP1378039

EP

B1

2005-05-04

JP2004538621

JP

A

2004-12-24

US6828168

US

B2

2004-12-07

JP2004534383

JP

A

2004-11-11

CN1524328

CN

A

2004-08-25

CN1509406

CN

A

2004-06-30

EP1378039

EP

A2

2004-01-07

EP1368623

EP

A1

2003-12-10

KR20030084994

KR

A

2003-11-01

KR20030083735

KR

A

2003-10-30

US2003169786

US

A1

2003-09-11

US2003162315

US

A1

2003-08-28

US6546029

US

B2

2003-04-08

US6542531

US

B2

2003-04-01

WO02075868

WO

A3

2002-12-12

AU2002234838

AU

A1

2002-10-03

WO02075263

WO

A1

2002-09-26

WO02075868

WO

A2

2002-09-26

US2002131464

US

A1

2002-09-19

US2002131458

US

A1

2002-09-19

Available on Infoscience
September 22, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/118542
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