Methods and apparatus for patterning a surface
The present invention provides methods and apparatus for locally patterning surfaces. In one such method, an oxidizable thioether is adsorbed onto a conductive surface 10. The surface is then contacted with a fluid medium M. A conducting stamp 12 is then brought into contact with the fluid medium above the thioether-coated surface. Next, a potential V is applied between the stamp and the surface. It is expected that the charge will be transferred through the medium to the coated surface along a shortest distance path, thereby locally oxidizing the thioether and effectively creating a negative patterned image of the conducting stamp on the surface. Remaining adsorbed thioether may then be used as a mask for standard etching or material addition procedures.
23258860
38086730
Alternative title(s) : (de) Verfahren und vorrichtungen zur strukturierung einer oberfläche (fr) Procedes et dispositif de formation de motifs sur une surface
TTO:6.0538
Patent number | Country code | Kind code | Date issued |
US2007120389 | US | A1 | 2007-05-31 |
EP1438738 | EP | A4 | 2007-04-18 |
US7091127 | US | B2 | 2006-08-15 |
EP1438738 | EP | A2 | 2004-07-21 |
MXPA04002555 | MX | A | 2004-06-18 |
US2003114002 | US | A1 | 2003-06-19 |
WO03024186 | WO | A3 | 2003-05-22 |
CA2460862 | CA | A1 | 2003-03-27 |
WO03024186 | WO | A2 | 2003-03-27 |