Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Electrical characterization of pseudomorphic GaAs/InGaAs/AlGaAs and AlGaAs/InGaAs/AlGaAs modulation doped field effect transistor-type heterostructures grown by molecular-beam epitaxy
 
research article

Electrical characterization of pseudomorphic GaAs/InGaAs/AlGaAs and AlGaAs/InGaAs/AlGaAs modulation doped field effect transistor-type heterostructures grown by molecular-beam epitaxy

Moreira, M. V. Baeta
•
Py, M.A.  
•
Gailhanou, M.
Show more
1992
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

We studied the influence of the indium composition y, growth temperature T(s) and InGaAs quantum-well channel thickness d(ch) on the 300 and 77 K Hall electrical properties of pseudomorphic modulation doped field effect transistor (MODFET)-type heterostructures grown by molecular-beam epitaxy. In agreement with Nguyen et al., we find an optimum channel thickness of 90 angstrom for an indium composition y = 0.25 of the channel. Significant improvements in sheet resistivity rho(s) and in carrier concentration n(so) were obtained by using AlGaAs doped barriers on both sides of the pseudomorphic channel. We were thus able to obtain a two-dimensional electron gas sheet density n(so) as high as 4.0 x 10(12) cm-2 at 77 K, which is among the highest values ever reported for MODFETs on GaAs.

  • Details
  • Metrics
Type
research article
DOI
10.1116/1.586307
Author(s)
Moreira, M. V. Baeta
Py, M.A.  
Gailhanou, M.
Ilegems, M.  
Date Issued

1992

Published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Volume

10

Issue

1

Start page

103

Subjects

critical layer thickness

•

quantum wells

•

gate-length

•

InGaAs

•

GaAs

•

relaxation

•

MODFETs

•

channel

•

HEMTs

•

RHEED

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LOEQ  
Available on Infoscience
August 27, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/117429
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés