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research article
Electrical Property of Platinum Micro Heater for Thermal Analysis of Microfluidic Device
This paper shows thermal measurement and analysis of a microfluidic device integrated with local thin film heater. Thermal analysis was calculated by finite element modeling. Electrical property of the micro heater was calibrated in advance of the thermal analysis due to the difference from the bulk property of Pt. The thermal analysis results agreed well with experimental results. Our integrative approach suggests an importance of proper electrical measurement in micro heaters with Joule heating.
Type
research article
Authors
Publication date
2015
Published in
Volume
135
Issue
8
Start page
338
End page
342
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
August 3, 2015
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