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conference paper
Towards fast femtosecond laser micromachining of glass, effect of deposited energy
2010
CLEO/QELS: 2010 Laser Science to Photonic Applications
We report on the effect of deposited energy for micro-machining of fused silica using femtosecond laser irradiation followed by chemical etching.
Type
conference paper
Authors
Publication date
2010
Publisher
Published in
CLEO/QELS: 2010 Laser Science to Photonic Applications
Publisher place
New York, NY
Peer reviewed
REVIEWED
EPFL units
Event name | Event place | Event date |
San Jose, California | May 16-21, 2010 | |
Available on Infoscience
July 20, 2015
Use this identifier to reference this record