Conference paper

Polymer micro-molding of femtosecond laser micromachined substrates

Micro-molding can be used for the cost-effective fabrication of elements such as active or passive components in MEMS devices, hydrophobic surfaces, cell-growth scaffolds or optical components such micro-lens arrays and gratings. This method is also particularly interesting for examining high-aspect ratio laser-machined structures fabricated in glass material. Thanks to this technique, surfaces not accessible with common imaging techniques can be observed on their molded negative structure with very high fidelity. As an illustration, we issue the use of the PDMS molding technique to analyze the quality of high aspect ratio holes and channels structures. Furthermore, we show preliminary results on the molding of a novel type of complex structures formed in glass using temporal and spatial beam shaping.


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