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conference paper
Design of a miniature laser scanning head for high-bandwidth, low-amplitude beam steering
2012
2012 INTERNATIONAL SYMPOSIUM ON OPTOMECHATRONIC TECHNOLOGIES (ISOT)
In laser micro-manufacturing, one of the challenges is to achieve fast scanning speed for fast fabrication of complex 3D microstructures. For microstructures with nanoscale features, it is often desirable to steer laser beams from a few microns to a few tens of nanometers away from their initial main trajectory. Here, we report on the design, fabrication and characterization of an optomechanical miniature laser scanning-head based on a movable focusing lens to cope with this challenge.
Type
conference paper
Authors
Publication date
2012
Published in
2012 INTERNATIONAL SYMPOSIUM ON OPTOMECHATRONIC TECHNOLOGIES (ISOT)
Peer reviewed
REVIEWED
EPFL units
Event name | Event place | Event date |
Paris, France | October 29-31, 2012 | |
Available on Infoscience
July 20, 2015
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