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conference paper
Optically-transparent actuators and micro-mechanical systems fabricated using femtosecond lasers
2013
CLEO: Applications and Technology 2013
Non-linear laser-matter interaction offers the possibility to structure transparent material in three dimensions. Here, we demonstrate that such process can be implemented for fabricating novel type of microsystems, including actuators transparent to visible light.
Type
conference paper
Web of Science ID
WOS:000355262501078
Authors
Publication date
2013
Publisher
Published in
CLEO: Applications and Technology 2013
ISBN of the book
978-1-55752-973-2
Publisher place
New York, NY
Series title/Series vol.
Conference on Lasers and Electro-Optics
Start page
ATu2N.2
Peer reviewed
REVIEWED
EPFL units
Event name | Event place | Event date |
San Jose, CA | June 09-14, 2013 | |
Available on Infoscience
July 20, 2015
Use this identifier to reference this record