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conference paper
Femtosecond Laser Processing of Active and Passive Devices for bio-MEMS
2013
2013 Conference on Lasers and Electro-Optics Pacific Rim (CLEOPR)
Femtosecond laser processing of glass has been proven to be an efficient tool for fabricating waveguides and microchannels. Here we show that monolithic integration in bio-Micro- Electro-Mechanical-Systems can be pushed forward by introducing additional functionalities.
Type
conference paper
Web of Science ID
WOS:000334176100257
Authors
Publication date
2013
Publisher
Published in
2013 Conference on Lasers and Electro-Optics Pacific Rim (CLEOPR)
ISBN of the book
978-1-4673-6476-8
Publisher place
New York, NY
Peer reviewed
REVIEWED
EPFL units
Event name | Event place | Event date |
Kyoto, JAPAN | June 30 - July 04, 2013 | |
Available on Infoscience
July 20, 2015
Use this identifier to reference this record