Femtosecond Laser Processing of Active and Passive Devices for bio-MEMS
Femtosecond laser processing of glass has been proven to be an efficient tool for fabricating waveguides and microchannels. Here we show that monolithic integration in bio-Micro- Electro-Mechanical-Systems can be pushed forward by introducing additional functionalities.
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Record created on 2015-07-20, modified on 2016-08-09