Femtosecond Laser Processing of Active and Passive Devices for bio-MEMS

Femtosecond laser processing of glass has been proven to be an efficient tool for fabricating waveguides and microchannels. Here we show that monolithic integration in bio-Micro- Electro-Mechanical-Systems can be pushed forward by introducing additional functionalities.


Presented at:
10th Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR), Kyoto, JAPAN, June 30 - July 04, 2013
Year:
2013
Publisher:
New York, NY, IEEE
ISBN:
978-1-4673-6476-8
Laboratories:




 Record created 2015-07-20, last modified 2018-09-13


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