Abstract
Femtosecond laser processing of glass has been proven to be an efficient tool for fabricating waveguides and microchannels. Here we show that monolithic integration in bio-Micro- Electro-Mechanical-Systems can be pushed forward by introducing additional functionalities.
Details
Title
Femtosecond Laser Processing of Active and Passive Devices for bio-MEMS
Author(s)
Bellouard, Yves
Published in
2013 Conference on Lasers and Electro-Optics Pacific Rim (CLEOPR)
Conference
10th Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR), Kyoto, JAPAN, June 30 - July 04, 2013
Date
2013
Publisher
New York, NY, IEEE
ISBN
978-1-4673-6476-8
Other identifier(s)
View record in Web of Science
Laboratories
GALATEA
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > GALATEA - Galatea Laboratory
Scientific production and competences > EPFL Partners > Neuchâtel Campus > GALATEA - Galatea Laboratory
Peer-reviewed publications
Work outside EPFL
Conference Papers
Published
Scientific production and competences > EPFL Partners > Neuchâtel Campus > GALATEA - Galatea Laboratory
Peer-reviewed publications
Work outside EPFL
Conference Papers
Published
Record creation date
2015-07-20