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  4. Optically transparent glass micro-actuator fabricated by femtosecond laser exposure and chemical etching
 
research article

Optically transparent glass micro-actuator fabricated by femtosecond laser exposure and chemical etching

Lenssen, Bo
•
Bellouard, Yves  
2012
Applied Physics Letters

Femtosecond laser manufacturing combined with chemical etching has recently emerged as a flexible platform for fabricating three-dimensional devices and integrated optical elements in glass substrates. Here, we demonstrate an optically transparent micro-actuator fabricated out of a single piece of fused silica. This work paves the road for further functional integration in glass substrate and optically transparent microsystems.

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Type
research article
DOI
10.1063/1.4750236
Author(s)
Lenssen, Bo
Bellouard, Yves  
Date Issued

2012

Publisher

American Institute of Physics

Published in
Applied Physics Letters
Volume

101

Issue

10

Article Number

103503

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
GALATEA  
Available on Infoscience
July 20, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/116419
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