Loading...
research article
Optically transparent glass micro-actuator fabricated by femtosecond laser exposure and chemical etching
Femtosecond laser manufacturing combined with chemical etching has recently emerged as a flexible platform for fabricating three-dimensional devices and integrated optical elements in glass substrates. Here, we demonstrate an optically transparent micro-actuator fabricated out of a single piece of fused silica. This work paves the road for further functional integration in glass substrate and optically transparent microsystems.
Type
research article
Authors
Publication date
2012
Publisher
Published in
Volume
101
Issue
10
Article Number
103503
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
July 20, 2015
Use this identifier to reference this record