Journal article

Optically transparent glass micro-actuator fabricated by femtosecond laser exposure and chemical etching

Femtosecond laser manufacturing combined with chemical etching has recently emerged as a flexible platform for fabricating three-dimensional devices and integrated optical elements in glass substrates. Here, we demonstrate an optically transparent micro-actuator fabricated out of a single piece of fused silica. This work paves the road for further functional integration in glass substrate and optically transparent microsystems.


    Record created on 2015-07-20, modified on 2017-05-10


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