Optically transparent glass micro-actuator fabricated by femtosecond laser exposure and chemical etching

Femtosecond laser manufacturing combined with chemical etching has recently emerged as a flexible platform for fabricating three-dimensional devices and integrated optical elements in glass substrates. Here, we demonstrate an optically transparent micro-actuator fabricated out of a single piece of fused silica. This work paves the road for further functional integration in glass substrate and optically transparent microsystems.


Published in:
Applied Physics Letters, 101, 10, 103503
Year:
2012
Publisher:
American Institute of Physics
ISSN:
0003-6951
Laboratories:




 Record created 2015-07-20, last modified 2018-03-17


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