Optically transparent glass micro-actuator fabricated by femtosecond laser exposure and chemical etching
Femtosecond laser manufacturing combined with chemical etching has recently emerged as a flexible platform for fabricating three-dimensional devices and integrated optical elements in glass substrates. Here, we demonstrate an optically transparent micro-actuator fabricated out of a single piece of fused silica. This work paves the road for further functional integration in glass substrate and optically transparent microsystems.
Record created on 2015-07-20, modified on 2016-08-09