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research article

Femtosecond versus picosecond laser machining of nano-gratings and micro-channels in silica glass

Corbari, Costantino
•
Champion, Audrey
•
Gecevičius, Mindaugas
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2013
Optics Express

The ability of 8 picosecond pulse lasers for three dimensional direct-writing in the bulk of transparent dielectrics is assessed through a comparative study with a femtosecond laser delivering 600 fs pulses. The comparison addresses two main applications: the fabrication of birefringent optical elements and two-step machining by laser exposure and post-processing by chemical etching. Formation of self-organized nano-gratings in glass by ps-pulses is demonstrated. Differential etching between ps-laser exposed regions and unexposed silica is observed. Despite attaining values of retardance (>100 nm) and etching rate (2 um/min) similar to fs pulses, ps pulses are found unsuitable for bulk machining in silica glass primarily due to the build-up of a stress field causing scattering, cracks and non-homogeneous etching. Additionally, we show that the so-called “quill-effect”, that is the dependence of the laser damage from the direction of writing, occurs also for ps-pulse laser machining. Finally, an opposite dependence of the retardance from the intra-pulse distance is observed for fs and ps direct writing.

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Type
research article
DOI
10.1364/OE.21.003946
Author(s)
Corbari, Costantino
Champion, Audrey
Gecevičius, Mindaugas
Beresna, Martynas
Bellouard, Yves  
Kazansky, Peter G.
Date Issued

2013

Publisher

Optical Society of America

Published in
Optics Express
Volume

21

Issue

4

Start page

3946

End page

3958

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
GALATEA  
Available on Infoscience
July 20, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/116418
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