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  4. Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica
 
research article

Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica

Bellouard, Yves  
•
Said, Ali A.
•
Bado, Philippe
2005
Optics Express

We present a novel optical sensor concept that merges integrated optics and micro-mechanics in a monolithic substrate. This concept pushes microsystems integration and defines a new class of monolithic optical microsystems where only optical signals are processed. As an illustration, we present a high-precision, monolithic, glass-based, micro-displacement sensor. Our displacement sensor is made out of a single piece of glass through a two-step process based on femtosecond laser illumination followed by chemical etching.

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Type
research article
DOI
10.1364/OPEX.13.006635
Author(s)
Bellouard, Yves  
Said, Ali A.
Bado, Philippe
Date Issued

2005

Publisher

Optical Society of America

Published in
Optics Express
Volume

13

Issue

17

Start page

6635

End page

6644

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
GALATEA  
Available on Infoscience
July 20, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/116384
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