Loading...
research article
Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching
2004
We present novel results obtained in the fabrication of high-aspect ratio micro-fluidic microstructures chemically etched from fused silica substrates locally exposed to femtosecond laser radiation. A volume sampling method to generate three-dimensional patterns is proposed and a systematic SEM-based analysis of the microstructure is presented. The results obtained gives new insights toward a better understanding of the femtosecond laser interaction with fused silica glass (a-SiO2).
Type
research article
Authors
Publication date
2004
Publisher
Published in
Volume
12
Issue
10
Start page
2120
End page
2129
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
July 20, 2015
Use this identifier to reference this record