Monolithic Three-Dimensional Integration of Micro-Fluidic Channels and Optical Waveguides in Fused Silica

This paper presents dramatic improvements in the micro-fabrication of three-dimensional microfluidic channels and high-aspect ratio tunnels within the bulk of a fused silica substrate. We also report the fabrication of optical waveguides within the same substrate, which is a major step towards the integration of sensing capabilities within microfluidic networks. This integrated device, which combines both fluidic channels and optical waveguides, opens new opportunities in bio- and chemical sensing. The flexibility of the improved manufacturing process offers substantial new design capabilities, especially for single channel probing and massively parallel processing and sensing.

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MRS Proceedings, 782

 Record created 2015-07-20, last modified 2018-01-28

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