Tunable Resonant Cavity Enhanced Detectors using Vertical MEMS Mirrors

Highly sensitive photodetectors for the mid infrared have been obtained by placing a photodiode inside a Fabry Perot cavity. These resonant cavity enhanced detectors (RCED) are sensitive at the resonances only, which depend on the distance between the two mirrors of the cavity. Displacing one of these mirrors allows changing the cavity length and thus selecting the detection wavelength. The design, simulation and fabrication of a MEMS mirror and its integration with the counter mirror and the photodiode grown by molecular beam epitaxy are presented. First results with external mirrors moved by piezoactuation are described, too.


Published in:
2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, 165-166
Presented at:
2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, Hualien, Taiwan, July 16 - august 12, 2007
Year:
2007
Publisher:
IEEE
Laboratories:




 Record created 2015-07-09, last modified 2018-09-13


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