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conference paper
Monolithic 50x50 MEMS Silicon Photonic Switches with Microsecond Response Time
2014
Optical Fiber Communication Conference
We report on 50x50 MEMS-actuated silicon photonic switches with 16V switching voltage and microsecond switching time. 2,500 MEMS cantilever 1x2 waveguide switches have been integrated on 9mmx9mm chips
Type
conference paper
Authors
Publication date
2014
Publisher
Published in
Optical Fiber Communication Conference
Publisher place
Washington, D.C.
Start page
M2K.2
Peer reviewed
REVIEWED
EPFL units
Event name | Event place | Event date |
San Francisco, California | 2014 | |
Available on Infoscience
July 9, 2015
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