Monolithic 50x50 MEMS Silicon Photonic Switches with Microsecond Response Time
Han, Sangyoon; Seok, Tae Joon; Quack, Niels; Yoo, Byung-Wook; Wu, Ming C.
2014

Abstract

We report on 50x50 MEMS-actuated silicon photonic switches with 16V switching voltage and microsecond switching time. 2,500 MEMS cantilever 1x2 waveguide switches have been integrated on 9mmx9mm chips

Details

Title Monolithic 50x50 MEMS Silicon Photonic Switches with Microsecond Response Time
Author(s) Han, Sangyoon ; Seok, Tae Joon ; Quack, Niels ; Yoo, Byung-Wook ; Wu, Ming C.
Published in Optical Fiber Communication Conference
Pages M2K.2
Conference Optical Fiber Communication Conference, San Francisco, California, 2014
Date 2014
Publisher Washington, D.C., OSA
DOI https://doi.org/10.1364/OFC.2014.M2K.2
Laboratories Q-LAB
Record Appears in Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > Q-LAB - Quack Group
Peer-reviewed publications
Work outside EPFL
Conference Papers
Published
Record creation date 2015-07-09