Wafer Level AlGe Eutectic Bonding for MEMS-Electronic-Photonic Heterogeneous Integration
2012
Details
Title
Wafer Level AlGe Eutectic Bonding for MEMS-Electronic-Photonic Heterogeneous Integration
Author(s)
Quack, Niels ; Han, Sangyoon ; Wu, Ming C.
Conference
International Nano-Optoelectronics Workshop, UC Berkeley and Stanford University, CA, USA, August 7-15, 2012
Date
2012
Laboratories
Q-LAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > Q-LAB - Quack Group
Presentations & Talks
Work outside EPFL
Presentations & Talks
Work outside EPFL
Record creation date
2015-07-08