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conference presentation
Wafer Level AlGe Eutectic Bonding for MEMS-Electronic-Photonic Heterogeneous Integration
2012
Type
conference presentation
Authors
Publication date
2012
EPFL units
Event name | Event place | Event date |
UC Berkeley and Stanford University, CA, USA | August 7-15, 2012 | |
Available on Infoscience
July 8, 2015
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