Overview on low temperature co-fired ceramic sensors
Low Temperature Co-fired Ceramics (LTCC) is one of the microelectronic techniques. This technology was initially developed as an alternative to Printed Circuit Boards (PCB) and classical thick-film technology, and it has found application in the fabrication of multilayer ceramic boards for electronic devices. Fast and wide development of this technology permitted the fabrication of 3D mechanical structures and integration with various different processes. Thanks to this, LTCC has found application in the manufacturing of various microelectronic devices. This paper presents an overview on LTCC technology and gives a detailed summary on physical quantity sensors fabricated using LTCC technique.
2015 Jurków SNA - revue capteurs LTCC - perso.pdf
Preprint
openaccess
7.94 MB
Adobe PDF
310bc74f0bd8ca5da5ceac4cea218f0c
Supplement - 2015-05-11 TM.pdf
openaccess
1.01 MB
Adobe PDF
90bb0a69ffe79cc2faad415e7b74dff1