Large Arrays Of Inkjet-Printed Mems Microbridges On Foil

This works describes the fabrication process of an array of printed MEMS microbridges on polymeric foil, performed in only four easy steps. Each functional material was deposited exclusively by inkjet-printing technique, compatible with large-area fabrication. The array occupies an area of 2 mm x 2 mm and consists of 80 individual microbridges of 120 mu m x 80 mu m size each. When connecting all the bridges in parallel, the array displays a total capacitance value of 1.5 pF. The potential of the fabricated array has been demonstrated by employing it as a swelling-based capacitive humidity sensor where the polymeric substrate acts directly as the sensing layer.

Published in:
The 27th International Conference On Micro Electro Mechanical Systems (Mems), 506-509
Presented at:
27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)', u'27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)'], San Francisco, USA, January 26-30, 2014
New York, IEEE

 Record created 2015-05-29, last modified 2020-07-29

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