Liquid-Filled Sealed Mems Capsules Fabricated By Fluidic Self-Assembly

We present a new method to encapsulate functional liquids into sealed MEMS capsules by fluidic self-assembly. Self-assembly of 200 mu m SU-8 cargos and picoliter liquid co-encapsulation are driven by the interplay of global fluidic drag and short-range capillary forces. The latter ensues from the localized surface-selective precipitation of a photopolymerizable adhesive onto the capsules' rim. Assembly yield higher than 50% is achieved, and can be improved by optimized agitation and shape matching. The method is massively parallel, scalable and compatible with batch MEMS fabrication. It can address a variety of applications, including distributed MEMS, cell encapsulation and drug delivery.


Published in:
IEEE 27th International Conference On Micro Electro Mechanical Systems (MEMS 2014), 56-59
Presented at:
[IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014)], San Francisco (USA), January 26-30, 2014
Year:
2014
Publisher:
New York, IEEE
Keywords:
Laboratories:




 Record created 2015-05-29, last modified 2018-03-17

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