Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Conferences, Workshops, Symposiums, and Seminars
  4. Femtosecond laser-based production of 3D micro- and nano-devices in transparent substrate: a step toward system-materials
 
conference paper

Femtosecond laser-based production of 3D micro- and nano-devices in transparent substrate: a step toward system-materials

Bellouard, Yves  
Klotzbach, U
•
Washio, K
Show more
2015
Laser-Based Micro- And Nanoprocessing Ix
Conference on Laser-Based Micro- and Nanoprocessing IX

Femtosecond laser irradiation applied to Fused Silica (the amorphous form of SiO2) defines a novel technology platform for highly integrated all-optical microsystems and beyond. In contrast with common approaches that rely on combining materials to achieve particular functions, femtosecond-laser fabricated microsystems rely on single material monolith, whose properties are locally and in the three-dimension functionalized by selective exposure. The combination of laser-functionalized zones with different physical properties allows us to direct-write integrated systems without the need for further assembly of packaging steps or without the need for multiple processing steps, like for instance sequences of layers deposition, exposure and etching steps.

  • Details
  • Metrics
Type
conference paper
DOI
10.1117/12.2086709
Web of Science ID

WOS:000354184400009

Author(s)
Bellouard, Yves  
Editors
Klotzbach, U
•
Washio, K
•
Arnold, Cb
Date Issued

2015

Publisher

Spie-Int Soc Optical Engineering

Publisher place

Bellingham

Published in
Laser-Based Micro- And Nanoprocessing Ix
ISBN of the book

978-1-62841-441-7

Total of pages

13

Series title/Series vol.

Proceedings of SPIE

Volume

9351

Subjects

Microsystems

•

MEMS

•

femtosecond laser

•

3D printing

•

3D writing

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
GALATEA  
Event nameEvent placeEvent date
Conference on Laser-Based Micro- and Nanoprocessing IX

San Francisco, CA

FEB 10-12, 2015

Available on Infoscience
May 29, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/114741
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés