Lens array by electrostatic patterning of dielectric microspheres in a Parylene-C well template

We present the fabrication of a microlens array which can be integrated into a microfluidic device. In the demonstrated technique, a microwell array is firstly fabricated in a Parylene-C layer by a standard cleanroom process. Afterwards, the optically transparent dielectric microspheres with high refractive index are patterned inside the well template by utilizing an electrostatic technique. The mechanism of microsphere patterning is studied, and the lens effect of the microsphere is experimentally verified in a water-based medium. We also present a detailed two-dimensional numerical optical simulation study on the patterned microspheres using the Finite Element Method (FEM).


Published in:
Proceedings of the 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 1737-1739
Presented at:
18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, San Antonio, USA, October 26-30, 2014
Year:
2014
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 Record created 2015-03-13, last modified 2018-09-13

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