Cite this item

de Koninck, D. A., Molina-Lopez, F., Briand, D., & de Rooij, N. F. (2014). Foil-Level Inkjet-Printed pyroMEMS Balloon Actuators: Fabrication, Modeling, and Validation. Journal of Microelectromechanical Systems, 23(6), 1417–1427. https://doi.org/10.1109/Jmems.2014.2314702

Click Copy to copy the citation, or select the text manually.