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  4. Structure and electronic properties of AlCrOxN1-x thin films deposited by reactive magnetron sputtering
 
research article

Structure and electronic properties of AlCrOxN1-x thin films deposited by reactive magnetron sputtering

Najafi, H.
•
Karimi, A.
•
Oveisi, E.  
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2014
Thin Solid Films

In this study, the main attempt is devoted to investigating the microstructure and electronic properties of AlCrOxN1 - x films in a wide range of oxygen concentrations from 0 to 1. These oxynitride films were deposited by pulsed DC magnetron sputtering from Al55Cr45 targets. Our results showed that films with x = O/(O + N) < 0.6, exhibit a cubic (B1) lattice with a well-developed columnar structure. The incorporation of oxygen into the films without any oxide segregation results in the formation of a substitutional AlCrOxN1 - x solid solution and material system behaves like nitrides electronically. In the range of oxygen contents from 0.6 <= O/(O + N) < 0.97, coatings with fine columns, diffuse boundaries and high values of metal vacancies were formed. However, the B1 lattice survived despite the large proportion of oxygen. According to the structural and electronic properties of the corresponding layers, we assign this region to the formation of an amorphous phase and metastable monoxides with a B1 structure. Coatings with O/(O + N) >= 0.97 are electronically assigned to a solid solution of alpha-(Al,Cr)(2)(O-0.97,N-0.03)(3) with corundum lattice and finer columnar structure. (C) 2014 Elsevier B.V. All rights reserved.

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Type
research article
DOI
10.1016/j.tsf.2014.07.066
Web of Science ID

WOS:000346056100029

Author(s)
Najafi, H.
Karimi, A.
Oveisi, E.  
Morstein, M.
Date Issued

2014

Publisher

Elsevier Science Sa

Published in
Thin Solid Films
Volume

572

Start page

176

End page

183

Subjects

Kinetic aspect

•

Oxynitride

•

Electronic structure

•

Monoxide

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LSME  
Available on Infoscience
February 20, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/111510
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