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research article
Control of cavity lifetime of 1.5 mu m wafer-fused VCSELs by digital mirror trimming
2014
Digital chemical etching is used to trim the output mirror thickness of wafer-fused VCSELs emitting at a wavelength near 1.5 mu m. The fine control of the photon cavity lifetime thus achieved is employed to extract important device parameters and optimize the combination of the threshold current, output power, and direct current modulation characteristics. The fabrication process is compatible with industrial production and should help in improving device yield and in reducing manufacturing costs. (c) 2014 Optical Society of America
Type
research article
Web of Science ID
WOS:000347179300053
Authors
Publication date
2014
Publisher
Published in
Volume
22
Issue
26
Start page
32180
End page
32187
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
February 20, 2015
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