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  4. UV-Sensitive Low Dark-Count PureB Single-Photon Avalanche Diode
 
research article

UV-Sensitive Low Dark-Count PureB Single-Photon Avalanche Diode

Qi, Lin
•
Mok, K. R. C.
•
Aminian, Mahdi  
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2014
Ieee Transactions On Electron Devices

A single-photon avalanche diode with high sensitivity in the ultraviolet (UV) wavelength range has been fabricated on Si using pure boron chemical vapor deposition to create both a nanometer-thin anode junction and a robust light entrance window. The device shows high sensitivity at the wavelengths of 330-370 nm when operated in the Geiger mode and good selectivity for UV light without applying a capping filter. The dark count rates can be as low as 5 Hz at room temperature for an active area of 7 mu m(2). An implicit guard ring, using an n-enhancement implantation in the central region of the diode, is applied instead of peripheral diffused p-type guard rings to achieve a high fill factor.

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Type
research article
DOI
10.1109/Ted.2014.2351576
Web of Science ID

WOS:000344544200028

Author(s)
Qi, Lin
Mok, K. R. C.
Aminian, Mahdi  
Charbon, Edoardo  
Nanver, Lis K.
Date Issued

2014

Publisher

Ieee-Inst Electrical Electronics Engineers Inc

Published in
Ieee Transactions On Electron Devices
Volume

61

Issue

11

Start page

3768

End page

3774

Subjects

Avalanche breakdown

•

boron

•

chemical vapor deposition (CVD)

•

Geiger-mode avalanche photodiode

•

single-photon avalanche diode (SPAD)

•

ultrashallow junctions

•

ultraviolet (UV)

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
AQUA  
Available on Infoscience
December 30, 2014
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/109743
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