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De Marchi, M., Sacchetto, D., Zhang, J., Frache, S., Gaillardon, P.-E., Leblebici, Y., & De Micheli, G. (2014). Top-Down Fabrication of Gate-All-Around Vertically-Stacked Silicon Nanowire FETs with Controllable Polarity. IEEE Transactions on Nanotechnology, 13(6), 1029–1038. https://doi.org/10.1109/Tnano.2014.2363386

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