Finfet with fully PH-responsive HFO<inf>2</inf> as highly stable biochemical sensor

In this work, highly scaled FinFETs (Fin Field Effect Transistors) are proposed as both sensing and circuit units of a lab-on-a-chip platform. The FinFET-based sensors with an HfO2 gate oxide demonstrate full pH-response with ΔVth ≈ 56 mV/pH. High readout sensitivity Sout = ΔId/Id ≈ 43% is achieved in combination with excellent device electronic properties, i.e. SS = 77 mV/dec and Ion/Ioff =1.5×10^6. High long-term stability is proven over 4.5 days with a drift in time limited at 0.14 mV/h.


Published in:
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), 1063-1066
Presented at:
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, CA, USA, 26-30 01 2014
Year:
2014
Publisher:
IEEE
Keywords:
Note:
Swiss Federal Program Nano-Tera “NanowireSensor” under contract reference 611_61.
Laboratories:




 Record created 2014-10-02, last modified 2018-09-13


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