Heterogeneous integration of ReRAM crossbars in a CMOS foundry chip

In this paper, we present a heterogeneous integration of ReRAMs with standard CMOS technology by post-processing the Back-End-of-the-Line (BEOL) of fully finished CMOS chips.


Published in:
Proceedings of the 40th International Micro and Nano Engineering Conference (MNE)
Presented at:
40th International Micro and Nano Engineering Conference (MNE), Lausanne, Switzerland, September 22-26, 2014
Year:
2014
Keywords:
Laboratories:




 Record created 2014-09-30, last modified 2018-03-18

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