Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. SU-8 as a Material for Microfabricated Particle Physics Detectors
 
research article

SU-8 as a Material for Microfabricated Particle Physics Detectors

Maoddi, Pietro  
•
Mapelli, Alessandro  
•
Jiguet, Sebastien
Show more
2014
Micromachines

Several recent detector technologies developed for particle physics applications are based on microfabricated structures. Detectors built with this approach generally exhibit the overall best performance in terms of spatial and time resolution. Many properties of the SU-8 photoepoxy make it suitable for the manufacturing of microstructured particle detectors. This article aims to review some emerging detector technologies making use of SU-8 microstructuring, namely micropattern gaseous detectors and microfluidic scintillation detectors. The general working principle and main process steps for the fabrication of each device are reported, with a focus on the advantages brought to the device functionality by the use of SU-8. A novel process based on multiple bonding steps for the fabrication of thin multilayer microfluidic scintillation detectors developed by the authors is presented. Finally, a brief overview of the applications for the discussed devices is given.

  • Files
  • Details
  • Metrics
Loading...
Thumbnail Image
Name

2072-666X-5-3-594.pdf

Type

Publisher's Version

Version

Published version

Access type

openaccess

License Condition

CC BY

Size

2.08 MB

Format

Adobe PDF

Checksum (MD5)

66b0a7426233cdd9daf33239e2d78f9b

Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés