In-situ sputter deposition of PbTiO3 thin films: nucleation on textured platinum films
1996
Abstract
The texture of sputter deposited PbTiO3 films could be turned from (100)- to (111)-orientation by adding a few nm thick TiO2 layer onto the textured Pt(111) substrate film. AES, XPS, and XPD measurements showed that such TiO2 films were epitaxially ordered and covered the whole surface of Pt. Various deposition experiments indicated that the TiO2 is effective only when it is ordered before the PbTiO3 nucleation starts. Otherwise, the (100) self texture dominates.
Details
Title
In-situ sputter deposition of PbTiO3 thin films: nucleation on textured platinum films
Author(s)
Muralt, Paul ; Maeder, Thomas ; Scalese, S. ; Naumović, D. ; Agostino, R. G. ; Xanthopoulos, Nicolas ; Mathieu, Hans Jörg
Published in
in Le Vide: science, technique et application
Volume
279
Pages
45-47
Conference
5th international Symposium on Trends and New Applications in Thin Films, Colmar (F), 1-3/4/1996
Date
1996
Note
Conference paper; extended version in JAP - see record #88910 on this repository (Journal of Applied Physics 83 (7), 3835-3841, 1998)
Laboratories
LC
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LC - Ceramics Laboratory
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2014-05-27