Conference paper

In-situ sputter deposition of PbTiO3 thin films: nucleation on textured platinum films

The texture of sputter deposited PbTiO3 films could be turned from (100)- to (111)-orientation by adding a few nm thick TiO2 layer onto the textured Pt(111) substrate film. AES, XPS, and XPD measurements showed that such TiO2 films were epitaxially ordered and covered the whole surface of Pt. Various deposition experiments indicated that the TiO2 is effective only when it is ordered before the PbTiO3 nucleation starts. Otherwise, the (100) self texture dominates.


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