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conference paper
Ferroelectric thin films for microsystems
1995
Proceedings of the 6th European Conference on Applied Surface and Interface Analysis (ECASIA), Montreux (CH), 1995
Deposition, integration and application issues of ferroelectric thin films are briefly reviewed. Applications in ultrasonic micromotors and infra-red sensors are treated in more detail. Current results on stress measurements across the ferroelectric phase transition and on pyroelectric devices are presented.
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Name
1995 Muralt ECASIA Montreux - ferroelectric thin films for MEMS - postprint.pdf
Type
Postprint
Access type
openaccess
Size
960.64 KB
Format
Adobe PDF
Checksum (MD5)
f0ab972b3f280f4b77d8761fccbc12a8