Micromachined PZT thin film actuators for micromotors

We fabricated and characterized a micromotor driven by a piezoelectric PZT (PbZrxTi1-xO3) thin films. Sputter and sol-gel techniques have been applied for the deposition of the PZT films onto a silicon stator membrane, which was 20 to 30 µm thick and had a diameter of 4 mm. The amplitudes of the membrane deflections are as large as 800 nm/V at the first resonance (26 kHz), and 60 nm/V at 1 Hz. The operation of the motor was obtained at 1 to 3 Vrms, with speeds of up to 200 rpm at 1.1 Vrms and torques of 35 nNm at 2.5 Vrms and 1mN force between rotor and stator. A long time test of 150 h showed no degradation of the motor performance.


Published in:
Oberflächen Werkstoffe, 5, 39-42
Year:
1995
Keywords:
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2014-05-20, last modified 2018-03-17

Publisher's version:
Download fulltext
PDF

Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)