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  4. Measurement and modeling of microlenses fabricated on single-photon avalanche diode arrays for fill factor recovery
 
research article

Measurement and modeling of microlenses fabricated on single-photon avalanche diode arrays for fill factor recovery

Pavia, Juan Mata  
•
Wolf, Martin
•
Charbon, Edoardo  
2014
Optics Express

Single-photon avalanche diode (SPAD) imagers typically have a relatively low fil factor, i.e. a low proportion of the pixel's surface is light sensitive, due to in-pixel circuitry. We present a microlens array fabricated on a 128x128 single-photon avalanche diode (SPAD) imager to enhance its sensitivity. The benefit and limitations of these light concentrators are studied for low light imaging applications. We present a new simulation software that can be used to simulate microlenses' performance under different conditions and a new non-destructive contact-less method to estimate the height of the microlenses. Results of experiments and simulations are in good agreement, indicating that a gain >10 can be achieved for this particular sensor. (C) 2014 Optical Society of America

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Type
research article
DOI
10.1364/Oe.22.004202
Web of Science ID

WOS:000332520000054

Author(s)
Pavia, Juan Mata  
Wolf, Martin
Charbon, Edoardo  
Date Issued

2014

Publisher

Optical Soc Amer

Published in
Optics Express
Volume

22

Issue

4

Start page

4202

End page

4213

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
AQUA  
Available on Infoscience
April 14, 2014
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/102809
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