Growth and properties of AlScN thin films for microwave transducers and piezoelectric energy harvesting


Advisor(s):
Muralt, Paul
Year:
2014
Publisher:
Lausanne, EPFL
Keywords:
Other identifiers:
urn: urn:nbn:ch:bel-epfl-thesis6086-2
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2014-04-01, last modified 2018-01-28

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