Basic properties of plasma-deposited amorphous and microcrystalline layers are summarized. Limitations for solar cell performance, which are a result of these basic properties are pointed out. Efficiencies and other solar cell parameters obtained for the best laboratory cells are presented and the resulting implications for future research discussed. Large-area Industrial modules and their typical key parameters are then given. Conclusions for the future market position of thin-film silicon PV as very low-cost renewable source of electricity are drawn up. (C) 2013 Elsevier B.V. All rights reserved.