A method for fabricating a micromechanical part from a substrate in which the part is fabricated by providing a plurality of fasteners between the part and the substrate, the fasteners being sacrificial, characterized in that the fasteners include at least one hinge at the end of each fastener located beside the part, and in that the method includes a step of breaking the sacrificial fasteners. The micromechanical parts employing this type of sacrificial fastener are also described.
Details
Title
Méthode de libération d'une pièce micromécanique et pièce micromécanique comprenant des attaches sacrificielles
Publisher
Organisation Mondiale de la Propriété Intellectuelle
Note
Alternative title(s) :
(de) Verfahren zur freisetzung eines mikromechanischen bauteils mit zerbrechlichen befestigungselementen
(fr) Methode de liberation d'une piece micromecanique et piece micromecanique comprenant des attaches sacrificielles
(en) Method for freeing a micromechanical part and a micromechanical part comprising sacrificial fasteners
