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conference presentation
Structuration of LTCC for integrated fluidics and micromechanical devices
2006
- Introduction 2) Common technological issues 3) Devices 4) Microreactors & mixers - shaping of LTCC 5) Membranes & “resistors” - C sacrificial layers 6) Force sensors - shaping of LTCC 7) Conclusions
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Name
2006 Maeder MicroNano Ilmenau - structuration LTCC.pdf
Type
Preprint
Access type
openaccess
Size
3.3 MB
Format
Adobe PDF
Checksum (MD5)
014646973eec60db61f778721aed125d