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  4. Piezoresistive Membrane-Type Surface Stress Sensor Arranged In Arrays For Cancer Diagnosis Through Breath Analysis
 
conference paper

Piezoresistive Membrane-Type Surface Stress Sensor Arranged In Arrays For Cancer Diagnosis Through Breath Analysis

Loizeau, Frederic
•
Lang, Hans Peter
•
Akiyama, Terunobu  
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2013
26th IEEE International Conference On Micro Electro Mechanical Systems MEMS 2013
26th IEEE International Conference on Micro Electro Mechanical Systems MEMS'2013

We present the fabrication, characterization and successful medical application of a membrane-type surface stress sensor (MSS), arranged in arrays for molecular detection in gaseous phase. Made out of SOI substrate, a round membrane with a diameter of 5 0 0 mu m and a thickness of 2.5 mu m is suspended by four sensing beams with integrated p-type piezoresistors, composing a full Wheatstone bridge. The membrane is coated with a thin polymer layer, which reacts with volatile molecules and produces a deflection of the membrane. The membranes were functionalized with various polymers and characterized as humidity sensors with a sensitivity of 87 mV/%RH and a time constant (Tau63%) of 1.3 s. Finally, through breath analysis and the use of principal component analysis (PCA), we were able, in a double blind trial, to distinguish cancer patients and healthy persons.

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Type
conference paper
DOI
10.1109/MEMSYS.2013.6474318
Web of Science ID

WOS:000320549200158

Author(s)
Loizeau, Frederic
Lang, Hans Peter
Akiyama, Terunobu  
Gautsch, Sebastian  
Vettiger, Peter
Tonin, Andreas
Yoshikawa, Genki
Gerber, Christoph
de Rooij, Nico  
Date Issued

2013

Publisher

IEEE

Publisher place

New York

Published in
26th IEEE International Conference On Micro Electro Mechanical Systems MEMS 2013
ISBN of the book

978-1-4673-5654-1

Total of pages

4

Start page

621

End page

624

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
SAMLAB  
Event nameEvent placeEvent date
26th IEEE International Conference on Micro Electro Mechanical Systems MEMS'2013

Taipei, Taiwan

January 20-24, 2013

Available on Infoscience
October 1, 2013
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/95939
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