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  4. Ultrathin InAlN/GaN heterostructures on sapphire for high on/off current ratio high electron mobility transistors
 
research article

Ultrathin InAlN/GaN heterostructures on sapphire for high on/off current ratio high electron mobility transistors

Lugani, Lorenzo  
•
Carlin, Jean-Francois  
•
Py, Marcel A.
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2013
Journal Of Applied Physics

We report on InAlN/GaN high electron mobility transistors (HEMTs) grown by metal organic vapor phase epitaxy on sapphire with ultrathin buffers. Two dimensional electron gas (2DEG) exhibiting high mobility (1100 cm(2) /V s) and low sheet resistivity (356 Omega/square) is achieved at room temperature for a buffer thickness as low as similar to 0.1 mu m. It is shown that despite a huge dislocation density imposed by this thin buffer, surface roughness is the main factor which affects the transport properties. In addition, sapphire surface nitridation is found to drastically affect the properties of the InAlN/GaN 2DEG. Eventually, HEMTs are processed from these heterostructures. Maximum current densities of 0.35 A/mm and current on-off ratios higher than 10(9) are measured, which make them suitable for high performance GaN based sensing in harsh environments. (C) 2013 AIP Publishing LLC.

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Type
research article
DOI
10.1063/1.4808260
Web of Science ID

WOS:000320674500084

Author(s)
Lugani, Lorenzo  
Carlin, Jean-Francois  
Py, Marcel A.
Martin, Denis
Rossi, Francesca
Salviati, Giancarlo
Herfurth, Patrick
Kohn, Erhard
Blaesing, Juergen
Krost, Alois
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Date Issued

2013

Publisher

Amer Inst Physics

Published in
Journal Of Applied Physics
Volume

113

Issue

21

Article Number

214503

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

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LASPE  
Available on Infoscience
October 1, 2013
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/95222
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