In-liquid MEMS assembly by optical trapping

This paper presents a novel in-liquid method to manipulate and micro-assemble MEMS in 3D by means of holographic optical trapping and hydrophobic interaction. Up to eight traps can be simultaneously generated with a trapping stiffness of 5 pN/mu m each. SU8 cylinders (10 mu m diameter, 10 mu m- 40 mu m height) were used as test MEMS, which could be translated with a speed of 6 mu m/s and rotated at 30 rpm. All forces were calibrated by video tracking the Brownian motion of the trapped MEMS and applying Boltzmann statistics. Selected surfaces of the MEMS parts were rendered hydrophobic and used as assembly sites. Using this approach it was possible to permanently assemble SU8 cylinders.


Published in:
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), 78-81
Presented at:
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), Taipei, Taiwan, 20-24 01 2013
Year:
2013
Publisher:
New York, IEEE
ISBN:
978-1-4673-5654-1
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2013-09-24, last modified 2018-03-17

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