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patent
Vertical cavity surface emitting devices incorporating wafer fused reflectors
2013
The invention refers to a method of manufacturing an optoelectronic device and in particular a method of manufacturing a vertical cavity surface emitting device incorporating wafer fused reflectors.
Type
patent
EPO Family ID
42364568
Author(s)
Note
Alternative title(s) : (de) Oberflächenemittierende vorrichtungen mit vertikalem resonator und durch waferverbundtechnik hergestellten spiegeln (fr) Dispositifs à émission par la surface et à cavité verticale avec des miroirs fabriqués par fusion de wafers
TTO classification
TTO:6.0863
| DOI | Country code | Kind code | Date issued |
US8652936 | US | B2 | 2014-02-18 |
EP2449638 | EP | B1 | 2013-09-04 |
US2012134381 | US | A1 | 2012-05-31 |
EP2449638 | EP | A1 | 2012-05-09 |
WO2011000568 | WO | A1 | 2011-01-06 |
Available on Infoscience
September 23, 2013
Use this identifier to reference this record