Domain and lattice contributions to dielectric and piezoelectric properties of PZT thin films as a function of composition

Hiboux, Stephane; Muralt, Paul; Maeder, Thomas

Domain and lattice contributions to dielectric and piezoelectric properties of PZT thin films as a function of composition

Hiboux, Stephane ; Muralt, Paul ; Maeder, Thomas

In situ reactively sputter deposited, 300-nm-thick Pb(Zrx,Ti1-x)O3 thin films were investigated as a function of composition, texture, and different electrodes (Pt,RuO2). X-ray diffraction analysis, ferroelectric, dielectric, and piezoelectric measurements were carried out. While for dielectric properties bulklike contributions from lattice as well as from domains are observed, domain wall contributions to piezoelectric properties are very much reduced in the morphotropic phase boundary (MPB) region. Permittivity and d33 do not peak at the same composition; the MPB region is broadened up and generally shifted to the tetragonal side.

Published in:

Journal of Materials Research, 14, 11, 4307-4318

Year:

1999

ISSN:

0884-2914

Keywords:

PZT thin films ; sputtering ; ferroelecttricity ; piezoelectricity ; ceramics ; microstructure ; capacitors ; texture

Note:

Hiboux, S Swiss Fed Inst Technol, Lab Ceram, CH-1015 Lausanne, Switzerland Swiss Fed Inst Technol, Lab Ceram, CH-1015 Lausanne, Switzerland
257FC
Times Cited:33
Cited References Count:31

Laboratories:

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Scientific production and competences > STI - School of Engineering > IMX - Institute of Materials > LC - Ceramics Laboratory
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