E-beam defined polysilicon piezoresistive cantilevers for intermolecular force detection


Published in:
4th Spanish Conference on Electron Devices (CDE), 495-498
Presented at:
4th Spanish Conference on Electron Devices (CDE), Calella, 2003
Year:
2003
Laboratories:




 Record created 2013-08-06, last modified 2018-03-17


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